Update 6-20-2011: Both Units have been sold. Dynaxa LLC has available a two one (2 1) BOC Edwards Helios process abatement scrubbers that are is in excellent condition and ready for immediate shipment. (6-6-2011 update: One was just sold and has a new home in the great Mid West!)
The Helios (part of the BOC Edwards Atlas family of products) is a combination process gas abatement tool with an inwardly fired, natural gas oxidation section followed by a three stage wet scrubber. The Helios unit is capable of handling 200 lpm of hydrogen in the effluent and up to 4 process inlets.
They are well suited for:
- Silicon Epitaxy
- III-V MOCVD
- Silicon Germanium Epitaxy.
These units already include WRU (Water Recirculation Unit) and Excess Air upgrades.
Photo’s below are of the one remaining unit.
Contact Dynaxa LLC at 203-300-5237 or www.DynaxaLLC.com
Helios Scrubber
I would like to buy BOC Edwards HELIOS Scrubbers for 1set
My company in taiwan,could you offer me the price and how to make the deal with you