Part of the Edwards Atlas scrubber line, the Kronis is targeted for abatmeent of low k CVD processes (3MS, 4MS, TMCTS,OMCTS, DMDMOS). Designed to handle high silica build up in these processes. The Kronis is designed for PFC abatement.
Stock Photo of Atlas Kronis. Actual Photos will be available upon request.
Contact Dynaxa LLC at 203-300-5237 or info@DynaxaLLC.com
Edwards Atlas Kronis April 2012