We have another one!
Dynaxa LLC can offer another CDO 862 in pristine condition. This is identical to the unit Dynaxa LLC sold last week. The CDO 862 was built specifically for Intel and was therefore meticulously maintained. This 862 has H2 reagent addition system for
treatment of NF3/F2 chamber clean applications utilizing remote plasma, high acid, low particulate byproducts. Multiple Inlets: Six inlet anodized aluminum entry assembly injects H2 to react with F2 to form HF. This prevents F2 corrosion in thermal section. Three Chamber tank with corrosion resistant recirculation pump (0.33 gpm freshwater utilization). All wetted metal components are Hastalloy to mitigate corrosion. Photos are of actual
unit SN 802768. These units are offered with factory trained start-up and training. More information at 203-300-5237 or
info@DynaxaLLC.com.
Hello Steve,
May I have your quotation?
R/Sam