Dynaxa LLC has 2 (two) Edwards Helios process abatement scrubbers that in excellent condition.
The Helios (part of the BOC Edwards Atlas family of products) is a combination process gas abatement tool with an inwardly fired, natural gas oxidation section followed by a three stage wet scrubber. The Helios unit is capable of handling 200 lpm of hydrogen in the effluent and up to 4 process inlets.
Application Include:
- Silicon Epitaxy
- III-V MOCVD
- Silicon Germanium Epitaxy.
Photo’s below are of the one of the units. More photos of both are available upon request.
Contact Dynaxa LLC at 203-300-5237 or info@DynaxaLLC.com
Helios April 2012