Dynaxa LLC has access to another BOC Edwards Helios process abatement scrubber that is in excellent condition and ready for immediate shipment. We sold two in June and hope that this will sell quickly!
The Helios (part of the BOC Edwards Atlas family of products) is a combination process gas abatement tool with an inwardly fired, natural gas oxidation section followed by a three stage wet scrubber. The Helios unit is capable of handling 200 lpm of hydrogen in the effluent and up to 4 process inlets.
They are well suited for:
- Silicon Epitaxy
- III-V MOCVD
- Silicon Germanium Epitaxy.
Photos are of actual unit. More information and photos are available by contacting us at 203-300-5237 or info@dynaxallc.com.
Helios Sept 2011 Internal