CDO 862 Multiple Inlet
August 29, 2011 Update: This unit was sold on 8/26/2011 by Dynaxa LLC. We may have another coming in so stay tuned. Dynaxa LLC can offer CDO 862 in Pristine Condition. The CDO 862 was built specifically for Intel and was therefore meticulously maintained. The 862 has H2 reagent addition system for
treatment of NF3/F2 chamber clean applications utilizing remote plasma, high acid, low particulate byproducts.
Multiple Inlets: Six inlet anodized aluminum entry assembly injects H2 to react with F2 to form HF. This prevents F2 corrosion in thermal section. Three chamber tank with
corrosion resistant recirculation pump (0.33 gpm freshwater utilization). All wetted metal components are Hastalloy to
mitigate corrosion. Photos are of actual unit. More information at 203-300-5237 or info@DynaxaLLC.com.
CDO 862 Internal
We need CDO 863 used tool, please let us know once you have it, thanks!
Sam
+886935352485
Sam: We will let you know when we get one and have verified condition.
Steve Griffing